Carbon nanotube structures made using catalyst islands

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United States of America Patent

PATENT NO 6346189
SERIAL NO

09133948

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Abstract

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The present invention includes several nanotube structures which can be made using catalyst islands disposed on a substrate (e.g. silicon, alumina, or quartz) or on the free end of an atomic force microscope cantilever. The catalyst islands are capable of catalyzing the growth of carbon nanotubes from carbon containing gases (e.g. methane). The present invention includes an island of catalyst material (such as Fe.sub.2 O.sub.3) disposed on the substrate with a carbon nanotube extending from the island. Also included in the present invention is a pair of islands with a nanotube extending between the islands, electrically connecting them. Conductive metal lines connected to the islands (which may be a few microns on a side) allows for external circuitry to connect to the nanotube. Such a structure can be used in many different electronic and microelectromechanical devices. For example, a nanotube connected between two islands can function as a resonator if the substrate beneath the nanotube is etched away. Also, the present invention includes a catalyst particle disposed on the free end of an AFM cantilever and having a nanotube extending from the particle. The nanotube can be used as the scanning tip of the AFM as is know in the art.

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Patent Owner(s)

Patent OwnerAddress
LELAND STANFORD JUNIOR UNIVERSITY BOARD OF TRUSTEES OF THE THE900 WELCH ROAD PALO ALTO CA 94304

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dai, Hongjie Sunnyvale, CA 106 6279
Kong, Jing Stanford, CA 36 1153
Quate, Calvin F Stanford, CA 80 3532
Soh, Hyongsok Stanford, CA 24 1056

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