Semiconductor processing reactor controllable gas jet assembly
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 19, 2002
Grant Date -
N/A
app pub date -
Feb 9, 2000
filing date -
Feb 9, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A gas jet assembly includes a gas injector having a longitudinal axis, a first motor coupled to the gas injector and a second motor coupled to the gas injector. The first motor controls a position of the gas injector along the longitudinal axis of the gas injector. The second motor controls the angular position of the gas injector around the longitudinal axis of the gas injector.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully