Methods for treating objects

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United States of America Patent

PATENT NO 6348101
SERIAL NO

09669789

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Abstract

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An object is treated by contacting it with an organic solvent and then removing the organic solvent by directly displacing it with a fluid comprising a drying vapor (e.g., isopropyl alcohol or IPA vapor) such that substantially no liquid droplets of organic solvent are left on the surfaces of the object to evaporate after the direct displacement of the organic solvent with the fluid.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054-3299

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Walter, Alan E Exton, PA 9 929

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