Linear drive system for use in a plasma processing system
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United States of America Patent
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-
Feb 26, 2002
Grant Date -
N/A
app pub date -
Dec 30, 1999
filing date -
Dec 30, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A linear drive assembly for moving a body associated with processing a substrate is disclosed. The linear drive assembly includes a first gear and a second gear, which is operatively engaged with the first gear. The linear drive assembly further includes a positioning member having a first portion and a second portion. The first portion is movably coupled to the second gear in a linear direction, and the second portion is fixed to a component associated with processing a substrate.
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