Micro-environment reactor for processing a workpiece
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United States of America Patent
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Feb 26, 2002
Grant Date -
N/A
app pub date -
Mar 13, 1998
filing date -
Mar 13, 1998
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An apparatus for processing a workpiece in a micro-environment is set forth. The apparatus includes a rotor motor and a workpiece housing. The workpiece housing is connected to be rotated by the rotor motor. The workpiece housing further defines a substantially closed processing chamber therein in which one or more processing fluids are distributed across at least one face of the workpiece by centripetal acceleration generated during rotation of the housing.
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