Micromirror device for image display apparatus
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United States of America Patent
Stats
-
Feb 26, 2002
Grant Date -
Jan 3, 2002
app pub date -
Apr 2, 1999
filing date -
Apr 10, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromirror device for an image display apparatus in which it is possible to drive a mirror by rotation is provided. The micromirror device according to the present invention includes a substrate, a pair of first posts protrusively formed on an upper surface of the substrate and, electrodes formed on the substrate. A supporting plate is supported by the first posts and rotatably arranged using a portion supported by the first posts as a hinge point, a second post is protrusively formed on the supporting plate, and a mirror is supported by the second post for reflecting light incident on one surface thereof, wherein a slope of the mirror can be controlled by an electrostatic attraction between the electrode and the mirror.
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