Electrostatic mechnically actuated fluid micro-metering device
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United States of America Patent
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Mar 5, 2002
Grant Date -
N/A
app pub date -
Aug 4, 2000
filing date -
Aug 4, 2000
priority date (Note) -
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Abstract
An electrostatic mechanically actuated micro-metering device having an array of fluid chambers with orifices for ejecting fluid is designed, such that the pitch of the chamber array is independent from length and height dimensions of the actuating membrane that comprises a chamber wall, resulting in a higher resolution without requiring a substantially exponential increase in the applied voltage.
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