Ink-jet print head, production method thereof, and printing apparatus with the ink-jet print head
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United States of America Patent
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Mar 5, 2002
Issued Date -
N/A
app pub date -
Jul 24, 1997
filing date -
Dec 22, 1992
priority date (Note) -
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Abstract
There is disclosed an ink-jet print head comprising a heat acting portion communicated with a liquid discharge orifice, an electrothermal energy conversion element for generating thermal energy, and an upper protection layer, wherein the heat acting portion gives the thermal energy to the liquid so as to generate a bubble in the liquid, the upper protection layer being a film formed by means of chemical vapor deposition using an organic silicon source as a source material. There is also disclosed a method of producing such an ink-jet print head described above, in which the upper protection layer is formed by means of chemical vapor deposition using source gases including an organic silicon source, after forming the heat acting portion with a circuit pattern by means of photolithography. The ink-jet print head according to the present invention provides high performance in discharge durability and in thermal response.
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