Electrostatic typeinkjet head having a vent passage and a manufacturing method thereof
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United States of America Patent
Stats
-
Mar 12, 2002
Grant Date -
N/A
app pub date -
Jun 29, 1999
filing date -
Jun 30, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic type inkjet head can be manufactured by a semiconductor manufacturing process without causing a problem inherent to a semiconductor manufacturing process. The inkjet head is produced by bonding a first body member and a second body member to each other. A plurality of vibration plates are formed on the first body member. A plurality of individual electrodes are formed on the second body member. Spacer portions are provided to at least one of the first body member and the second body member so that the first body member and the second body member are bonded to each other with the spacer portions therebetween. The spacer portions define a space providing a gap between each of the vibration plates and a respective one of the individual electrodes. Vent passages connecting each of the spaces to atmosphere are formed by the spacer portions so as to release gasses generated in the space during a manufacturing process.
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