Heating element for heating crucibles and arrangement of heating elements

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United States of America Patent

PATENT NO 6355910
SERIAL NO

09733835

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Abstract

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There is provided a heating element and an arrangement of heating elements, respectively, for heating crucibles, in particular for LEC devices for growing semiconductor single crystals, with a tulip-shaped bottom heater (20) being built such that the heater legs of the main heater (40) positioned thereabove can barely be guided towards the bottom. Such arrangement of bottom and main heater enables multi-heater arrangements without having to interfere with a lateral insulation (18) which, thus, need not be cut out or pierced.

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Patent Owner(s)

Patent OwnerAddress
FREIBERGER COMPOUND MATERIALS GMBH09599 FREIBERG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eichler, Stefan Dresden, DE 19 119
Kohler, Andreas Freiberg, DE 23 561
Seidl, Albrecht Freiberg, DE 29 88

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