Process for producing planar waveguide structures as well as waveguide structure
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 12, 2002
Grant Date -
N/A
app pub date -
Jul 14, 1999
filing date -
Jul 15, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A process for producing a waveguide, wherein a first layer is deposited on a silicon or glass substrate, a core structure is subsequently structured, and the core structure is protected by a protective layer. Prior to each step for depositing a new layer, the layer that has just been applied is fluorinated.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully