Micro-electro-mechanical fluid ejector and method of operating same
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United States of America Patent
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Mar 19, 2002
Grant Date -
N/A
app pub date -
Oct 12, 1999
filing date -
Oct 15, 1998
priority date (Note) -
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Abstract
A micro-electromechanical fluid ejector that is easily fabricated in a standard polysilicon surface micromachining process is disclosed, which can be batch fabricated at low cost using existing external foundry capabilities. In addition, the surface micromachining process has proven to be compatible with integrated microelectronics, allowing for the monolithic integration of the actuator with addressing electronics. A voltage drive mode and a charge drive mode for the power source actuating a deformable membrane is also disclosed.
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