Pad conditioner cleaning apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6358124
SERIAL NO

09222180

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Abstract

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A chemical mechanical polishing apparatus includes a pad conditioner having a conditioner head, a cleaning cup for receiving and cleaning the conditioner head of the pad conditioner, and a fluid dispenser for dispensing a cleaning fluid onto the conditioner head.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Brian J Palo Alto, CA 204 5717
Fishkin, Boris San Carlos, CA 46 1181
Hoey, Gee San Jose, CA 4 48
Koga, Raijiro Tsuchiura, JP 3 47
Kumagai, Takashi Yokohama, JP 149 2091
Lu, Bruce Hsin-Chu, TW 2 24
Lu, Rex Hsin-Chu, TW 2 22
Redeker, Fred C Fremont, CA 195 5499
Shu, Roland Hsin-Chu, TW 1 19
Tsuruta, Hiromi Sakura, JP 3 32
Wang, K Y Hsin-Chu, TW 2 19

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