Czochralski crystal growth system with an independently supported pull head
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United States of America Patent
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-
Mar 19, 2002
Issued Date -
N/A
app pub date -
Nov 3, 1999
filing date -
Jan 25, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pull head of a Czochralski crystal puller is mounted on a receiving chamber via a mounting apparatus that provides for pull head alignment. The mounting apparatus has a top plate for secured to the receiving chamber, a bottom plate for supporting the pull head, and an adjustment mechanism disposed on the bottom plate for adjustably positioning the top plate with respect to the bottom plate, and, thus, the puller head with respect to the receiving chamber. Accordingly, the pull head can be adjusted with respect to the crucible rotation axis and can be positioned in order to insure that its rotation axis is substantially vertical.
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