Film forming apparatus and film forming method
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United States of America Patent
Stats
-
Mar 26, 2002
Grant Date -
N/A
app pub date -
Aug 4, 1999
filing date -
Aug 4, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A drive pulley is disposed to a driving motor. A plurality of follower pulleys are disposed to a rotating shaft of a spin chuck that vacuum sucks a substrate. A belt is passed from one follower pulley to the drive pulley. Belts are passed from the other follower pulleys to the drive shafts of a plurality of air motors. Since the air motors assist the driving of the driving motor, a large substrate can be rotated at a predetermined rotating acceleration. Thus, a film forming apparatus and a film forming method that allow the quantity of process solution supplied to be reduced and a film of process solution to be equally formed on a substrate can be provided.
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