Method of etching transparent solid material with laser beam
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United States of America Patent
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Mar 26, 2002
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app pub date -
Mar 15, 1999
filing date -
Sep 21, 1998
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Abstract
A method of etching a surface of a transparent solid material with a laser beam, wherein the surface is irradiated with the laser beam having a fluence of 0.01-100 J/cm.sup.2 /pulse while maintaining a fluid capable of absorbing the laser beam in contact with an opposite surface of the solid material.
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