Method and device for nondestructive detection of crystal defects

United States of America Patent

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Mar 26, 2002
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N/A
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May 25, 1999
filing date
Jun 18, 1998

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Expired

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Abstract

The nondestructive detection and characterization of crystal defects in monocrystalline semiconductor material is by a combination of photoluminescence heterodyne spectroscopy, photothermal heterodyne spectroscopy and SIRD.

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Patent Owner	Address
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALIEN AG	JOHANNES-HESS-STRASSE 24 BURGHAUSEN 84489

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G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....

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Inventor Name	Address	# of filed Patents	Total Citations
Ehlert, Andreas	Mehring, DE	3	12
Helmreich, Dieter	Burghausen, DE	5	79
Kerstan, Michael	Burghausen, DE	17	136
Lundt, Holger	Burghausen, DE	6	219

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Method and device for nondestructive detection of crystal defects

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09318655

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PATENT NO	6362487
SERIAL NO	09318655
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09318655

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