Probe station having multiple enclosures
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 26, 2002
Issued Date -
N/A
app pub date -
Jul 17, 2001
filing date -
Jun 6, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
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