Method and apparatus for transferring wafer cassettes in microelectronic manufacturing environment
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United States of America Patent
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Apr 2, 2002
Grant Date -
N/A
app pub date -
Oct 1, 1999
filing date -
Oct 1, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer transport cart comprises a wheeled support structure and an upright member which is pivotably coupled to the support structure. The upright member has a handle which is pivotably coupled to a wafer cassette support, which comprises a pair of fork-like arms. Wafer production personnel can maneuver the cart adjacent a wafer manufacturing load port, and unload a wafer cassette from the cart to the load port or vice versa, by employing movements of the upright member and the handle. Shock-absorbing dampers are provided for the upright member and the handle. An inter-cart coupling mechanism enables a plurality of carts to be joined together for tandem transport within the manufacturing facility. The arms mate with mating regions on the wafer cassette and on the load port. An alignment notch mates with an alignment pin on the load port. Also described are methods of using the wafer transport cart to load and unload a wafer cassette.
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