Printhead of ink jet printing apparatus and manufacturing method therefor
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United States of America Patent
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Apr 2, 2002
Grant Date -
N/A
app pub date -
Sep 23, 1999
filing date -
Jun 29, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method in accordance with present invention comprises the steps of: forming a micro-control apparatus having a plurality of ejecting elements; forming a first layer of film on said micro-control apparatus and forming a plurality of ink chambers in the first layer of film; forming a second layer of photosensitive film on said first layer of film and forming an ink orifice in said second layer of photosensitive film relative to each of said plurality of ink chambers in the first layer of film by photolithography. The method for manufacturing the printhead in accordance with the present invention is relatively simple. Using this method, the application of a nozzle plate to a dry film photoresist and the precision alignment between ink orifices and ink chambers in manufacturing a conventional printhead can be avoided so that the throughput and yield rate can be increased.
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