Methods for growing large-volume single crystals from calcium fluoride and their uses
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United States of America Patent
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Apr 2, 2002
Grant Date -
Oct 4, 2001
app pub date -
Mar 2, 2001
filing date -
Mar 3, 2000
priority date (Note) -
Expired
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Abstract
The method for making a uniform, large-size single crystal of calcium fluoride includes placing a single precursor crystal of calcium fluoride in a tempering vessel provided with a cover; introducing calcium fluoride powder into the tempering vessel and subsequently heating the single precursor crystal, preferably in intimate contact with the calcium fluoride powder, in the tempering vessel together with the calcium fluoride powder for two or more hours at temperatures above 1150.degree. C. to temper the precursor crystal and thus form the uniform, large-scale single crystal of calcium fluoride. The uniform large-sized single crystals of calcium fluoride can be used to make improved lens, prism, light-conducting rod, optical window or other optical component for DUV photolithography, steppers, excimer lasers, wafers, computer chips and electronic devices containing the wafers and chips.
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