Fluid dispensing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 9, 2002
Grant Date -
N/A
app pub date -
Dec 14, 2000
filing date -
Dec 14, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Fluid dispensing apparatus for dispensing small precise metered quantities of fluid, for example in a semiconductor manufacturing process, comprises two metering chambers disposed in series. Each metering chamber has an associated piston rod and fluid is dispensed therefrom alternately. Twice the volume of fluid is displaced from the upstream metering chamber so that when it dispenses fluid at the same time it can refill the second downstream metering chamber.
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Cited Art Landscape
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