Optical waveguide probe and its manufacturing method
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United States of America Patent
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Apr 9, 2002
Grant Date -
N/A
app pub date -
Nov 9, 1999
filing date -
Dec 15, 1997
priority date (Note) -
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Abstract
The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process. This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.
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