Capacitive sensor
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United States of America Patent
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-
Apr 16, 2002
Grant Date -
N/A
app pub date -
Apr 19, 1999
filing date -
Apr 17, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A capacitive sensor including a first electrode and a second electrode which are disposed opposite each other in spaced-apart relationship to form a capacitor, the first electrode being disposed on a first substrate and the second electrode on a second substrate, the substrates being joined together at the sides of the electrodes, and the second substrate forming, in the area of the second electrode, a diaphragm deformable by pressure. An electronic signal processing device for processing the measurement signals is incorporated in one of the substrates below the electrode disposed thereon.
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