Support frame for substrates
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 16, 2002
Issued Date -
N/A
app pub date -
Oct 20, 2000
filing date -
Sep 21, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing chamber. In one embodiment, the support frame comprises one or more longitudinal members coupled to one or more transverse members. The transverse members preferably define a supporting surface on which a heated susceptor is mounted. The longitudinal member is preferably disposed below the heated susceptor, thus minimizing thermal expansion of the longitudinal member. Spacers made of thermally conductive material may be disposed at appropriate locations along the members to provide more uniform distribution of heat within the members.
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