Fluoropolymer coating of lithium niobate integrated optical devices
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United States of America Patent
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Apr 16, 2002
Grant Date -
N/A
app pub date -
Jun 11, 1998
filing date -
Jun 11, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An integrated optical device is made starting with a substrate of lithium niobate. A fluoropolymer solution is applied to coat at least part of the substrate. The substrate having fluoropolymer coat is prepared such that a metal film will adhere to the fluoropolymer coating. Next, an electrode is created by applying a metal film to the fluoropolymer coat. The preparing step is preferably accomplished by heating the substrate with the fluoropolymer coating on it such that the fluoropolymer coating is annealed, the annealing of the fluoropolymer coating improving the adhesion of the metal film to the fluoropolymer coating. Alternately, the preparing of the substrate having fluoropolymer coating includes, simultaneously with the application of the metal film, cooling the substrate with the fluoropolymer coating by contacting a thermal sink with the substrate with the fluoropolymer coating.
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