Importance

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Abstract

An electromagnet that produces a uniaxial magnetic field for magnetically orienting thin films on a substrate in a low-pressure processing environment is arranged with a plate-shaped core having a circular periphery and an electromagnetic coil having windings that are arranged in a pattern across a front side of the core for reducing skew of the uniaxial magnetic field. The individual windings include lengths divided in different proportions between straight center sections and two bent end sections. The straight sections of the windings, which extend normal to a winding axis, incrementally decrease in length from the center towards the periphery of the core along the winding axis. Spacing between adjacent center sections of the windings is greater than a spacing between adjacent end sections of the front winding portions along the core periphery. The end sections are increasingly bent at the core periphery as a function of cumulative differences in spacing between the center and end sections.

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First Claim