Semiconductor processing spray coating apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 23, 2002
Grant Date -
Dec 13, 2001
app pub date -
May 23, 2000
filing date -
Mar 6, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.
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