Method and device for treating exhaust gas
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United States of America Patent
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Apr 23, 2002
Grant Date -
N/A
app pub date -
Aug 13, 1999
filing date -
Dec 15, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process and an apparatus for treating an exhaust gas, in which a raw gas and high-boiling intermediate products contained in the exhaust gas let out from a CVD system employing a silicon-containing gas is brought into contact with a transition metal such as nickel or a silicide of such transition metals to decompose or convert them into stable halides, followed by detoxication treatment of the harmful components contained in the exhaust gas.
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