Method for crystallizing lithium transition metal oxide thin film by plasma treatment
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United States of America Patent
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Apr 23, 2002
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N/A
app pub date -
Oct 17, 2000
filing date -
May 1, 2000
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Expired
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Abstract
A method for crystallizing a lithium transition metal oxide thin film for an electrode of a thin film-type lithium secondary battery is provided, in which the lithium transition metal oxide thin film is reacted with oxygen or argon plasma induced by a microwave or a radio frequency wave, thereby obtaining an excellent lithium transition metal oxide thin film in a degree of crystallization and electrochemical characteristics.
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