Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer
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United States of America Patent
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Apr 23, 2002
Grant Date -
N/A
app pub date -
Aug 24, 2000
filing date -
Aug 24, 2000
priority date (Note) -
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Abstract
A Micro Electro-Mechanical System (MEMS) switch (100) having a bottom electrode (116) formed over a substrate (112) and a thin protective cap layer (130) disposed over the bottom electrode (116). A dielectric material (118) is disposed over the protective cap layer (130) and a pull-down electrode (122) is formed over the spacer (120) and the dielectric material (118). The protective cap layer (130) prevents the oxidation of the bottom electrode (116). The thin protective cap layer (130) comprises a metal having an associated oxide with a high dielectric constant. A portion (132) of the thin protective cap layer (130) may oxidize during the formation of the dielectric material (118), increasing the capacitance of the dielectric stack (128).
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