Device and method for delivering various transparent substrates into a high-precision measuring instrument

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United States of America Patent

PATENT NO 6377870
SERIAL NO

09685095

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Abstract

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A device and method for delivering various substrates into a high-precision measuring instrument. The device comprises a magazine in which are configured several compartments in which substrate holders for different substrates can be deposited. Also provided is a loading station in which the substrate holders can be loaded with the substrate that matches the substrate holder. An automatic transfer device removes substrate holders from the magazine and introduces them into the loading station, or removes the substrate holders together with the introduced substrate from the loading station. The automatic transport device is configured as a robot arm at whose front end sits a fork.

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Patent Owner(s)

Patent OwnerAddress
LEICA MICROSYSTEMS SEMICONDUCTOR GMBHGERMANY WETZLAR WETZLAR HESSIAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blaesing-Bangert, Carola Huettenberg, DE 14 62
Kaczynski, Ulrich Bad Nauheim, DE 15 217

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