Method of producing zinc oxide film, method of producing photovoltaic element, and method of producing semiconductor element substrate

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United States of America Patent

PATENT NO 6379521
SERIAL NO

09222848

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Abstract

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The present invention provides a method of producing a zinc oxide film, which comprises applying current between a conductive base member immersed in an electrodepositing bath and a counter electrode immersed in the electrodepositing bath to form a zinc oxide film on the conductive base member, wherein the electrodepositing bath is maintained at a temperature of 50.degree. C. or more and has a temperature profile such that the temperature of the electrodepositing bath is lower in the final stage of electrodeposition than in the initial of electrodeposition. By the present method, a zinc oxide film with the excellent effect of light containment is stably produced in a short time, thereby producing a solar cell with a high efficiency at low a cost.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHATOKYO 146-8501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nishio, Yutaka Kyotanabe, JP 8 223

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