Method and apparatus for inspecting high-precision patterns
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 30, 2002
Grant Date -
N/A
app pub date -
Oct 20, 1997
filing date -
Oct 23, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A device and method for inspecting a test piece with a laser beam in which the laser beam is divided into plural beams, and each of the plural beams has an identification marker, such as a particular polarity or intensity. Each of the marked beams, scans a different portion of the test piece to reduce the time needed to inspect the test piece.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully