Fluid control apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6382238
APP PUB NO 20010020488A1
SERIAL NO

09801896

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Lower members of each of lines A, B, C, D, E, P are mounted on a subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16, 17, 18, 19 of each line are mounted on the lower members with screws, and the subbase panels 3 is mounted on a single main base panel 2. Channel connecting element 50 is removable upward.

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First Claim

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Patent Owner(s)

  • FUJIKIN INCORPORATED;TOKYO ELECTRON LIMITED

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishii, Ken Kawasaki, JP 84 638
Kawano, Yuji Osaka, JP 55 1133
Okabe, Tsuneyuki Tsukui-gun, JP 50 977
Yamaji, Michio Osaka, JP 158 2995

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