Coating film forming apparatus and coating film forming method
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United States of America Patent
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-
May 7, 2002
Grant Date -
N/A
app pub date -
Dec 13, 2000
filing date -
Dec 20, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A coating area of wafer W is divided into, for example, three regions. The wafer W and/or a supply nozzle are driven in a predetermined coating direction and/or a coating direction such that coating start positions of the adjacent divided regions are not next to each other and/or the coating is not continuously performed in order of a coating end position and a coating start position when the coating end position of one region of the adjacent divided regions and the coating start position of the other region are adjacent to each other, whereby forming a liquid film of a resist liquid for each divided region of the surface of wafer W. As a result, a phenomenon, in which the resist liquid is drawn to the coating start position, so as to increase the film thickness of this portion, occurs in only the corresponding region. Resultantly, uniformity of an inner surface of the film thickness can be improved.
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