Developing method and developing unit
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United States of America Patent
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-
May 7, 2002
Grant Date -
Jul 26, 2001
app pub date -
Jan 18, 2001
filing date -
Jan 21, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention is a method for developing a substrate by supplying a developing solution from a developing solution supply nozzle onto a surface of the substrate mounted on a predetermined position, and comprises the steps of moving the developing solution supply nozzle from a standby position of the developing solution supply nozzle outside one end of the substrate to at least the other end of the substrate without supplying the developing solution, and thereafter, moving the developing solution supply nozzle from the other end to at least the one end while supplying the developing solution. Therefore, the developing solution supply nozzle which is used once and has a possibility of a drip of the developing solution does not pass above the substrate, so that the developing solution never drips from the developing solution supply nozzle onto the substrate before and after supplying the developing solution for some reason or other. Therefore, developing defect due to the drip of the developing solution can be prevented.
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