Vertical comb drive actuated deformable mirror device and method
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United States of America Patent
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May 7, 2002
Grant Date -
N/A
app pub date -
Mar 27, 1998
filing date -
Mar 27, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A deformable mirror includes a vertical comb actuator having a reflective surface attached thereto. The vertical comb drive includes stationary elements interspersed with moving elements. When a potential difference is provided between these elements, the moving elements are pulled downward, thereby deforming the reflective surface. The vertical comb drive typically includes a plurality of actuators, which are individually electrically addressed. Each actuator may be an array of interspersed elements or a cavity and corresponding tooth. Springs support the moving elements and bias the reflective surface in an original position. The vertical comb drive provides a large stroke and substantially linear voltage-versus-displacement curve throughout the stroke.
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