Cleaning apparatus
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United States of America Patent
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-
May 14, 2002
Grant Date -
N/A
app pub date -
Apr 11, 2000
filing date -
Apr 19, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A cleaning apparatus includes a nozzle having an ejection port, a cleaning liquid path communicating with the ejection port, and a compressed gas path communicating with the ejection port. The cleaning apparatus further includes a cleaning liquid feeding component for feeding a cleaning liquid to the cleaning liquid path, and a compressed gas feeding component for feeding a compressed gas to the compressed gas path. The compressed gas is ejected from the ejection port through the compressed gas path, while the cleaning liquid is ejected from the ejection port through the cleaning liquid path.
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