Redirecting optical mask for creating re-entrant nozzles
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United States of America Patent
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May 14, 2002
Grant Date -
Oct 25, 2001
app pub date -
May 25, 2001
filing date -
Feb 1, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for manufacturing ink-jet printheads having nozzles with re-entrant profiles has the following steps. A source of electromagnetic energy is created which is then used with an optical system to produce a source of energy having a constant illumination angle on an process plane. A substrate is then exposed with the electromagnetic source to define the nozzles having the re-entrant profile. Also, apparatus for creating the constant illumination angle include an optical deflecting mask and an afocal optical system.
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