Method and apparatus for simulating a surface photo-voltage in a substrate
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United States of America Patent
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May 14, 2002
Grant Date -
N/A
app pub date -
Jan 13, 2000
filing date -
Jan 13, 1999
priority date (Note) -
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Abstract
This invention relates to a method and apparatus for simulating a surface photo-voltage, more particularly with a photodiode on a process sized disk for calibrating surface photo-voltage measurement devices. The device for simulating a surface photo-voltage includes the photodiode, the disk, a resistor, and may further include an operational amplifier. The apparatus for simulating a surface photo-voltage of the current invention facilitates calibration of surface photo-voltage measurement devices by using a process sized disk to fit directly on a surface photo-voltage measurement chuck.
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