Methods of making wire grid optical elements by preferential deposition of material on a substrate
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United States of America Patent
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May 21, 2002
Grant Date -
N/A
app pub date -
Apr 3, 2000
filing date -
Apr 3, 2000
priority date (Note) -
Expired
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Abstract
A method for making wire grid optical elements by preferentially depositing material on a substrate is disclosed. Material can be preferentially deposited by directing an electromagnetic interference pattern on to a substrate to selectively heat areas of the substrate coincident with the interference pattern maxima. The substrate can then be exposed to gas phase material that is capable of preferentially accumulating on surfaces based on surface temperature.
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