Substrate temperature control system and method for controlling temperature of substrate
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United States of America Patent
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-
May 28, 2002
Issued Date -
N/A
app pub date -
Mar 16, 2000
filing date -
Apr 2, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
To provide a substrate temperature control system capable of unifying the temperature of the substrate and capable of shortening the temperature elevation time (temperature lowering time), the substrate temperature control system is equipped with a temperature control plate (heating or cooling plate) having a plurality of projections on its surface and acting to set the temperature of the substrate. A chuck mechanism is provided to fix the substrate in contact with a plurality of the projections by chucking the substrate toward the temperature control plate.
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