Contact structure formed over a groove
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United States of America Patent
Stats
-
Jun 4, 2002
Grant Date -
N/A
app pub date -
Apr 30, 1999
filing date -
Apr 30, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A contact structure for achieving an electrical connection with a contact target is formed by producing a contactor on a planar surface of a substrate by a microfabrication technology. The contact structure is comprised of a substrate having a planar surface, a groove formed on the substrate lower than the planar surface, and a contactor formed on the substrate. The contactor includes a horizontal portion which is a substantially straight beam with a fixed and a free end, and a contact portion mounted on the free end of the horizontal portion in a direction perpendicular to the horizontal portion. The fixed end is connected to the substrate and the free end is positioned over the groove on the substrate. The groove provides a free space for the contactor when it is pressed against the contact target such that the free end of the horizonal beam enters the groove.
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