US Patent No: 6,400,738

Number of patents in Portfolio can not be more than 2000

Tunable Fabry-Perot filters and lasers

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Abstract

A tunable optical cavity constructed from a fixed mirror and a movable mirror. The fixed mirror is attached to a substrate having a first electrically conducting surface. A support member having the moveable mirror supported thereon and having a second electrically conducting surface, is suspended above the substrate. A circuit applies an electrical potential between the first and second electrically conducting surfaces thereby adjusting the distance between the fixed and movable mirrors. The fixed mirror and the moveable mirror are positioned such that the mirrors form the opposite ends of the optical cavity. The distance between the fixed mirror and the moveable mirror is a function of the applied electrical potential. The fixed mirror is mounted in a well in the substrate such that distance between the support member and the substrate is less than half the distance between the mirrors.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
AGILENT TECHNOLOGIES, INC.PALO ALTO, CA4655

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sorin, Wayne V Mountain View, CA 100 1197
Tucker, Rodney S Hawthron, AU 16 207

Cited Art

Patent Info (Count) # Cites Year
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
6,078,395 Tunable Fabry-Perot interferometer with floating electrode on one mirror and control electrode pair on opposing mirror 22 1998
 
LUCENT TECHNOLOGIES INC. (1)
6,275,324 Micromachined tunable optical filter with controllable finesse and passband wavelength position 17 1998
 
XEROX CORPORATION (1)
6,295,130 Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer 69 1999

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (48)
7,855,824 Method and system for color optimization in a display 15 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 22 2005
7,626,751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7,928,928 Apparatus and method for reducing perceived color shift 4 2005
8,362,987 Method and device for manipulating color in a display 0 2005
8,008,736 Analog interferometric modulator device 0 2005
8,004,504 Reduced capacitance display element 3 2005
8,102,407 Method and device for manipulating color in a display 8 2005
7,911,428 Method and device for manipulating color in a display 14 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 17 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,898,521 Device and method for wavelength filtering 17 2005
7,782,293 Device and method for wavelength filtering 0 2005
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 1 2006
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
8,059,326 Display devices comprising of interferometric modulator and sensor 1 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
8,115,987 Modulating the intensity of light from an interferometric reflector 0 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 2 2007
7,982,700 Conductive bus structure for interferometric modulator array 0 2007
7,999,993 Reflective display device having viewable display on both sides 0 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 1 2007
8,111,445 Spatial light modulator with integrated optical compensation structure 1 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 1 2008
8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer 0 2008
8,023,167 Backlight displays 0 2008
8,054,527 Adjustably transmissive MEMS-based devices 0 2008
8,193,441 Photovoltaics with interferometric ribbon masks 0 2008
8,270,056 Display device with openings between sub-pixels and method of making same 0 2009
8,098,431 Method and device for generating white in an interferometric modulator display 0 2009
8,102,590 Method of manufacturing MEMS devices providing air gap control 0 2009
8,081,370 Support structures for electromechanical systems and methods of fabricating the same 0 2009
8,405,899 Photonic MEMS and structures 0 2009
8,358,266 Light turning device with prismatic light turning features 0 2009
8,270,062 Display device with at least one movable stop element 0 2009
8,068,269 Microelectromechanical device with spacing layer 0 2009
7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator 1 2009
8,098,416 Analog interferometric modulator device with electrostatic actuation and release 0 2010
8,081,373 Devices and methods for enhancing color shift of interferometric modulators 0 2010
8,213,075 Method and device for multistate interferometric light modulation 0 2010
8,035,883 Device having a conductive light absorbing mask and method for fabricating same 0 2011
8,098,417 Electromechanical system having a dielectric movable membrane 0 2011
8,368,997 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,416,154 Apparatus and method for reducing perceived color shift 0 2011
8,289,613 Electromechanical device with optical function separated from mechanical and electrical function 0 2011
8,174,752 Interferometric modulator in transmission mode 0 2011
8,390,547 Conductive bus structure for interferometric modulator array 0 2011
8,243,360 Device having a conductive light absorbing mask and method for fabricating same 0 2011
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
7,061,681 Fabry-Perot interferometer 9 2004
7,733,553 Light modulator with tunable optical state 2 2005
7,447,891 Light modulator with concentric control-electrode structure 2 2005
 
NP PHOTONICS, INC. (3)
6,665,109 Compliant mechanism and method of forming same 6 2002
6,678,084 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing 0 2002
6,747,775 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same 11 2002
 
SEIKO EPSON CORPORATION (3)
7,304,800 Optical tunable filter and method of manufacturing the same 1 2004
7,301,703 Tunable filter and method of manufacturing the same, and sensing device 3 2005
7,483,211 Optical tunable filter and method of manufacturing the same 0 2006
 
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE (2)
7,116,863 Thermally actuated wavelength tunable optical filter 1 2004
7,209,608 Wavelength tunable optical filter 0 2004
 
OPTRON SYSTEMS, INC. (2)
6,822,798 Tunable optical filter 16 2002
7,116,463 High angular deflection micro-mirror system 4 2004
 
AGILENT TECHNOLOGIES, INC. (1)
6,724,785 Tunable fabry-perot filters and lasers with reduced frequency noise 8 2000
 
ERICSSON AB (1)
6,665,459 Wavelength selective optical filter 5 2002
 
SOLUS MICRO TECHNOLOGIES, INC. (1)
6,597,461 Tunable fabry-perot interferometer using entropic materials 8 2001
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION (1)
7,804,600 Ring-laser gyroscope system using dispersive element(s) 2 2008
 
THE UNIVERSITY OF WESTERN AUSTRALIA (1)
7,541,584 Resonant cavity enhanced device and a method for fabricating same 2 2003
 
VIVIDON, INC. (1)
6,747,784 Compliant mechanism and method of forming same 5 2002
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (1)
8,446,674 Method and structure capable of changing color saturation 0 2010

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