Surface measuring apparatus
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United States of America Patent
Stats
-
Jun 11, 2002
Grant Date -
N/A
app pub date -
Aug 4, 1998
filing date -
Oct 31, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A stylus is carried at one end of a support arm mounted so as to be pivotable about a pivot axis to allow the stylus to follow a surface during relative movement between the stylus and the surface. A drive arrangement is responsive to pivotal movement of the support arm to drive the support arm to maintain the support arm at a substantially constant attitude. A measuring arrangement is provided for measuring the displacement of the stylus. The measuring arrangement uses a measuring element mounted to one end of the support arm adjacent the stylus. The measuring arrangement may be an interferometer and the measuring element a corner cube mounted so as to be aligned with the tip of the stylus.
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International Classification(s)
Cited Art Landscape
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