Heat and cooling treatment apparatus and substrate processing system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 11, 2002
Grant Date -
Aug 16, 2001
app pub date -
Dec 6, 2000
filing date -
Dec 9, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention is an apparatus for performing heat and cooling treatments for a substrate includes: a heating table for mounting the substrate thereon to perform the heat treatment for the substrate; a cooling table for mounting the substrate thereon to perform the cooling treatment for the substrate; a waiting table for allowing the substrate to wait; a carrying mechanism for carrying the substrate between the heating table, the cooling table, and the waiting table; and airflow formation means for forming airflow in a space in which the heating table, the cooling table, and the waiting table are arranged.
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