Method of making a support circuit for a semiconductor chip assembly

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United States of America Patent

PATENT NO 6402970
SERIAL NO

09643213

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of manufacturing a support circuit includes providing a conductive layer with top and bottom surfaces, providing a top etch mask on the top surface that includes an opening that exposes a portion of the top surface, providing a bottom etch mask on the bottom surface that includes an opening that exposes a portion of the bottom surface, applying an etch to the exposed portion of the top surface through the opening in the top etch mask, thereby etching partially but not completely through the conductive layer and forming a recessed portion in the conductive layer below the top surface, forming an insulative base on the recessed portion without forming the insulative base on the top surface, and applying an etch to the exposed portion of the bottom surface through the opening in the bottom etch mask, thereby forming a through-hole in the recessed portion that extends to and is covered by the insulative base.

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Patent Owner(s)

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International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Charles W C 34 Pinewood Grove, Singapore 738290, SG 215 3509

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