Fluid-encapsulated MEMS optical switch
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United States of America Patent
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Jun 11, 2002
Grant Date -
N/A
app pub date -
Oct 19, 1999
filing date -
Oct 23, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 .mu.m wide and 2 .mu.m thick, resulting in shorter actuation distances of approximately 15 .mu.m. This feature results in an optical switch having faster switching times.
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