Imaging system

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United States of America Patent

PATENT NO 6407810
SERIAL NO

09522540

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Abstract

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A system for imaging an object is described. The system includes a light source for illuminating the object with light, the light from the light source having a first wavelength. The system further includes an image capturing device and a filter device. The filter device is transmissive for light having a wavelength which different than the first wavelength, and reflective for light having the first wavelength, the image capturing device capturing an image of at least a portion of the object using light transmitted through the filter device. The system may further include a dark field illumination system for illuminating the object either simultaneously with the illumination by the first light source, or sequentially with respect to the illumination by the first light source.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Kuo-Ching Setauket, NY 56 714
Reven, Shawn Point Lookout, NY 3 42

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